MKS Released RF Power Generator Suitable for PV, LED and MEMS Applications

Aug 16, 2011 A cost-effective, compact solution for photovoltaic, LED and semiconductor processing has been presented by MKS Instruments, Inc. Their elite(TM) RF Power Generator for amorphous Si PV, LED and MEMS applications has integrated, single PCBA design  that offers exceptional reliability. In addition its air cooled, compact, light weight design provides a cost-effective, easy-to-install solution for RF deposition and etch needs.

The elite(TM) RF generator is available in 2U full rack and 3U half rack enclosures to allow for rack mounting, and is available in power levels of 300W, 600W and 750W. The robust, full rack design eliminates cables and connectors, while the patented inductive clamp technology protects the generator from adverse VSWR load conditions. The air-cooled, single phase, efficient 13.56 MHz generator results in low cost-of-ownership.

The elite(TM) RF generator can be used for amorphous thin film solar manufacturing, LED passivation and etch, MEMS and semiconductor processes including PVD, CVD, ALD, strip and etch. The elite(TM) generator can also be applied for cleaning, surface treatment and coating of medical components; and back end electronic packaging.

For official press release visit:

Author:  Alice Jones

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