KLA-Tencor™ Announces Adoption of Candela® Inspection System by Epistar

Oct 17, 2011 Last week  KLA-Tencor Corporation™, the world's leading supplier of process control and yield management solutions for the semiconductor and related industries, announced that Taiwan-based Epistar, a leading manufacturer of LED chips, has adopted KLA-Tencor's Candela® substrate and epitaxy (epi) wafer inspection system. This system is characterized by advanced wafer defect detection technology that expedites root cause analysis. It speeds up process development and improves yield.

The introduction of the Candela tool to Epistar's manufacturing process provides automated inspection methods for sapphire substrates to ensure vendor quality, and provides greater visibility into the (GaN) epi process to help detect root cause defectivity and early prediction of process excursions. According to an Epistar spokesperson, "Adoption of KLA-Tencor's Candela inspection has provided Epistar with improved sapphire quality control and MOCVD process control."

Substrate defects are known to impact epi process yield, and the Candela system provides increased sensitivity to these yield-limiting defects. With its proprietary optical design and detection technology, the Candela system detects and classifies sub-micron defects—including micro-cracks and -scratches, polishing and brushing streaks, and chemical residues. As LED manufacturers transition production to larger wafer sizes and introduce new patterned sapphire substrate (PSS) processes, the economic impact of resulting process-induced defects is significant. For defects occurring during the epi process steps, the Candela tool can detect hexagonal pits and bumps which can lead to electrical failure and epi cracks that can adversely impact field reliability.  

"The Candela system allows LED manufacturers to conduct root cause analysis to speed process development, quickly fine tune production processes to minimize process excursions, and ultimately achieve higher yield per wafer," said Jeff Donnelly, group vice president, Growth and Emerging Markets (GEM) Group at KLA-Tencor. "We are pleased to add Epistar to the growing list of Candela adopters."

The Candela tool is now installed in Epistar's Taiwan facility, adding to the hundreds of Candela tools currently installed around the world. The Candela tool is part of KLA-Tencor's integrated LED portfolio, which includes the ICOS® WI-series and Klarity® LED. These tools are backed by KLA-Tencor's global, comprehensive service network. For more information on KLA-Tencor's LED market offerings, please visit www.kla-tencor.com

Source: http://ir.kla-tencor.com/releasedetail.cfm?corpSection=PR&ReleaseID=614543

Author:  Alice Jones

Back to the list


Reviews forum #FORUM# is not exist

Submit Product Review

Download Review Form

LED Jobs Banner LED Directory Banner


Recent News

12/06/2011 Pleasanton Library Cuts Energy Use By 46% With Adura Technologies Wireless Lighting Controls

12/06/2011 Forepi Selects AIXTRON´s New 19x4-inch CRIUS II-XL

12/06/2011 Future Lighting Solutions Wins 2011 Best LED Service Provider Award

12/06/2011 Leica Microsystems Presented Its Latest Range of Innovative LED Illumination Modules for Microscopy

12/06/2011 Xicato Introduced 3000lm and 4000lm XLM LED Modules

12/06/2011 A.C. Lighting Inc Appointed LedGo North American Distributor

12/05/2011 Electronics Weekly Publishes Interview with Adrian Rawlinson, Marl International

12/05/2011 New ENCELIUM White Paper Examines How Addressable Dimming Controls Help Buildings Earn LEED Points

12/05/2011 i-Pix Satellite Mk II LED Fixtures Launched in September 2011 Gain Immediate Popularity

12/05/2011 Lumenpulse Unveiled Corporate Headquarters with "Evolution of Light" Event in Montreal, Canada

12/05/2011 Anolis Deliveres LED Architectural Lighting Solutions in South Africa

12/02/2011 Lighting Science Group's New 60-Watt Equivalent LED World Bulb Receives Consumer Electronics Show Best of Innovations Award

12/02/2011 Jim H. McClung Lighting Research Foundation Announced Funding of Research Projects

12/02/2011 Magnalight.com Introduced New Explosion Proof Handheld LED

12/02/2011 SDG&E LED Holiday Light Exchange Brings Energy Savings to Balboa Park, Chula Vista and Escondido

12/01/2011 ZENARO Presents New Louver Luminaires with T5 LED Tubes

12/01/2011 Arima Changzhi Ramps Up HB LED Capacity with AIXTRON G4 MOCVD Systems

12/01/2011 CSA's State-of-the-Art LED Lighting Laboratory Opened in Atlanta

11/30/2011 Chroma-Q™ Launched Three New LED Luminaires

11/30/2011 Cree Introduced the New LMH2 LED Module Family