Optical Metrology of Patterned Sapphire Substrates for HB-LEDs from Zeta Instruments

Oct 24, 2011 Azonano.com has published a concise overview of the commercially available system offered by Zeta Instruments for precise characterization of sapphire wafers.

It is noted that high-brightness light emitting diodes (HB-LEDs) are mostly formed on sapphire wafers. Patterning the substrates with tiny structures ensures a drastic improvement in the light extraction efficiency of the completed device. PSS wafers also solve critical issues that include crystal dislocations and refractive index mismatch. The Zeta-PSS Package offers quick characterization of substrate bump features. Height, width, and pitch are determined in the same scan. Recipes are available for all types of substrate bumps that include cone-shaped, dome-shaped, flat-topped, or photoresist.

The Zeta Optical Profiler System includes the following salient features:

Automated feature analysis
Exceptional measurement potential
Automated Feature Analysis
This feature is easy to use and production-ready and is capable of the following:

The Zeta Optical Profiler takes a large area scan (70 µm x 90 µm) in seconds.
Using the Zeta 3D software, a one-page analysis report can be obtained that includes 2D and 3D images, a cross section, and statistical analysis of all features in the field of view.
Numerical results are saved in spreadsheet-friendly text format.
Automated X-Y stage and multisite recipes allow characterization of the entire wafer.

The specific features and options of the Zeta-PSS Package include the following:

Manual load system for R&D and automated XY stage for production
Vacuum chucks for wafers of different sizes
Vibration and Environmental noise isolation package Piezo stage for 2nm height resolution
True color 3D imaging enable review of defects such as scratches or missing bumps
Zeta 3D Software analyzes standard 2D or 3D wafer images for general surface characterization:

Step height
Surface roughness
Feature size, diameter, area, and volume
Wafer bow
3D surface visualization in true color

Customized PSS analysis software includes production-ready recipes for cone, dome, and flat-topped bumps. Hardware includes Zeta’s unique PSS specific illumination optics.

Source: http://www.azonano.com/article.aspx?ArticleID=2937

More information available at manufacturer's website at: http://www.zeta-inst.com/page/led

Author:  Alice Jones

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